Description
Models APC500 APC600
X,Y Axis Travels
500x400mm
600x500mm
Stage glass sizes
557x457mm
657x557mm
Z Axis Travel
200/400mm
200/400mm
X,Y,Z Axis Resolution
1μm
1μm
Accuracy
1.5+L/150
1.5+L/150
Video magnification
23X~190X
23X~190X
Field of view
10.6mm~1.6mm
10.6mm~1.6mm
Working distance
90mm
90mm
