Description
Screen size 400mm with 4 film clips
Travel-X.Z axis
250mm*150mm
Travel-Y
100mm
Table size
450mm*200mm
Table load capacity
30kg
Net weight 240kg
Object lens
5x,10x (Std), 20x, 50x, 100x
Magnification accuracy
0.08% contour, 0.12% surface
Power supply
AC110-120v, 200-240v, single phase 50/60Hz
Linear scale-X. Y axis
0.5µm resolution
Angle measuring
0.01°or 1′ resolution
Accuracy
2.5+L/150µm
Repeatability
0.003mm
